Nanometric Silicon Device Design, Fabrication and Characterization
Mansun J. Chan
EECS Department, University of California, Berkeley
1995
Advisors: Ping K. Ko
BibTeX citation:
@phdthesis{Chan:8432, Author= {Chan, Mansun J.}, Title= {Nanometric Silicon Device Design, Fabrication and Characterization}, School= {EECS Department, University of California, Berkeley}, Year= {1995}, }
EndNote citation:
%0 Thesis %A Chan, Mansun J. %T Nanometric Silicon Device Design, Fabrication and Characterization %I EECS Department, University of California, Berkeley %D 1995 %F Chan:8432