G. Gregori and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/14
April 1996
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-14.pdf
BibTeX citation:
@techreport{Gregori:M96/14, Author = {Gregori, G. and Lieberman, Michael A.}, Title = {RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source}, Institution = {EECS Department, University of California, Berkeley}, Year = {1996}, Month = {Apr}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html}, Number = {UCB/ERL M96/14} }
EndNote citation:
%0 Report %A Gregori, G. %A Lieberman, Michael A. %T RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source %I EECS Department, University of California, Berkeley %D 1996 %@ UCB/ERL M96/14 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html %F Gregori:M96/14