Y.T. Lee, Michael A. Lieberman, Allan J. Lichtenberg, F. Bose, H. Baltes and R. Patrick
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/23
April 1996
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-23.pdf
BibTeX citation:
@techreport{Lee:M96/23, Author = {Lee, Y.T. and Lieberman, Michael A. and Lichtenberg, Allan J. and Bose, F. and Baltes, H. and Patrick, R.}, Title = {Global Model for High Pressure Electronegative Radio-Frequency Discharges}, Institution = {EECS Department, University of California, Berkeley}, Year = {1996}, Month = {Apr}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html}, Number = {UCB/ERL M96/23} }
EndNote citation:
%0 Report %A Lee, Y.T. %A Lieberman, Michael A. %A Lichtenberg, Allan J. %A Bose, F. %A Baltes, H. %A Patrick, R. %T Global Model for High Pressure Electronegative Radio-Frequency Discharges %I EECS Department, University of California, Berkeley %D 1996 %@ UCB/ERL M96/23 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html %F Lee:M96/23