Y.T. Lee and Michael A. Lieberman and Allan J. Lichtenberg and F. Bose and H. Baltes and R. Patrick

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M96/23

, 1996

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-23.pdf

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BibTeX citation:

@techreport{Lee:M96/23,
    Author= {Lee, Y.T. and Lieberman, Michael A. and Lichtenberg, Allan J. and Bose, F. and Baltes, H. and Patrick, R.},
    Title= {Global Model for High Pressure Electronegative Radio-Frequency Discharges},
    Year= {1996},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html},
    Number= {UCB/ERL M96/23},
}

EndNote citation:

%0 Report
%A Lee, Y.T. 
%A Lieberman, Michael A. 
%A Lichtenberg, Allan J. 
%A Bose, F. 
%A Baltes, H. 
%A Patrick, R. 
%T Global Model for High Pressure Electronegative Radio-Frequency Discharges
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/23
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3008.html
%F Lee:M96/23