K.R. Williams and Richard S. Muller

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M96/37

, 1996

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-37.pdf

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BibTeX citation:

@techreport{Williams:M96/37,
    Author= {Williams, K.R. and Muller, Richard S.},
    Title= {Etching for Micromachining Processing},
    Year= {1996},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html},
    Number= {UCB/ERL M96/37},
}

EndNote citation:

%0 Report
%A Williams, K.R. 
%A Muller, Richard S. 
%T Etching for Micromachining Processing
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/37
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html
%F Williams:M96/37