Etching for Micromachining Processing

K.R. Williams and Richard S. Muller

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/37
June 1996

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-37.pdf

BibTeX citation:

@techreport{Williams:M96/37,
    Author = {Williams, K.R. and Muller, Richard S.},
    Title = {Etching for Micromachining Processing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1996},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html},
    Number = {UCB/ERL M96/37}
}

EndNote citation:

%0 Report
%A Williams, K.R.
%A Muller, Richard S.
%T Etching for Micromachining Processing
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/37
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html
%F Williams:M96/37