K.R. Williams and Richard S. Muller
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M96/37
June 1996
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-37.pdf
BibTeX citation:
@techreport{Williams:M96/37, Author = {Williams, K.R. and Muller, Richard S.}, Title = {Etching for Micromachining Processing}, Institution = {EECS Department, University of California, Berkeley}, Year = {1996}, Month = {Jun}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html}, Number = {UCB/ERL M96/37} }
EndNote citation:
%0 Report %A Williams, K.R. %A Muller, Richard S. %T Etching for Micromachining Processing %I EECS Department, University of California, Berkeley %D 1996 %@ UCB/ERL M96/37 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3036.html %F Williams:M96/37