M. Wessels

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M96/49

1996

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-49.pdf

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BibTeX citation:

@techreport{Wessels:M96/49,
    Author= {Wessels, M.},
    Title= {The Effect of Plasma Loading on Impedance as Observed in an Inductively Coupled Plasma Source},
    Year= {1996},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3061.html},
    Number= {UCB/ERL M96/49},
}

EndNote citation:

%0 Report
%A Wessels, M. 
%T The Effect of Plasma Loading on Impedance as Observed in an Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3061.html
%F Wessels:M96/49