B.P. Linder

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M96/98

, 1996

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-98.pdf

---

BibTeX citation:

@techreport{Linder:M96/98,
    Author= {Linder, B.P.},
    Title= {Application of the Plasma Immersion Ion Implantation Coupled Plasma Model for Energy Spread and Oxide Charging},
    Year= {1996},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3151.html},
    Number= {UCB/ERL M96/98},
}

EndNote citation:

%0 Report
%A Linder, B.P. 
%T Application of the Plasma Immersion Ion Implantation Coupled Plasma Model for Energy Spread and Oxide Charging
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/98
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3151.html
%F Linder:M96/98