Charles H. Fields

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M97/16

, 1997

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/ERL-97-16.pdf

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Fields:M97/16,
    Author= {Fields, Charles H.},
    Title= {Direct Aerial Image Monitoring for Extreme Ultraviolet Lithography Systems},
    School= {EECS Department, University of California, Berkeley},
    Year= {1997},
    Month= {Mar},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3194.html},
    Number= {UCB/ERL M97/16},
}

EndNote citation:

%0 Thesis
%A Fields, Charles H. 
%T Direct Aerial Image Monitoring for Extreme Ultraviolet Lithography Systems
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/16
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3194.html
%F Fields:M97/16