G.A. Luurtsema
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/49
July 1997
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/ERL-97-49.pdf
BibTeX citation:
@techreport{Luurtsema:M97/49, Author = {Luurtsema, G.A.}, Title = {Spin Coating for Rectangular Substrates}, Institution = {EECS Department, University of California, Berkeley}, Year = {1997}, Month = {Jul}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3265.html}, Number = {UCB/ERL M97/49} }
EndNote citation:
%0 Report %A Luurtsema, G.A. %T Spin Coating for Rectangular Substrates %I EECS Department, University of California, Berkeley %D 1997 %@ UCB/ERL M97/49 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3265.html %F Luurtsema:M97/49