Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection

Robert J. Socha

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M97/55

1997

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/Archive/ERL-97-55.pdf

Advisors: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Socha:M97/55,
    Author= {Socha, Robert J.},
    Title= {Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection},
    School= {EECS Department, University of California, Berkeley},
    Year= {1997},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3273.html},
    Number= {UCB/ERL M97/55},
}

EndNote citation:

%0 Thesis
%A Socha, Robert J. 
%T Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/55
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3273.html
%F Socha:M97/55