Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection

Robert J. Socha

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/55
August 1997

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/ERL-97-55.pdf

Advisor: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Socha:M97/55,
    Author = {Socha, Robert J.},
    Title = {Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection},
    School = {EECS Department, University of California, Berkeley},
    Year = {1997},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3273.html},
    Number = {UCB/ERL M97/55}
}

EndNote citation:

%0 Thesis
%A Socha, Robert J.
%T Propagation Effects of Partially Coherent Light in Optical Lithography and Inspection
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/55
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3273.html
%F Socha:M97/55