A Traveling Wave Driven, Inductively Coupled Large Area Plasma Source

Y. Wu and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M97/68

1997

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/Archive/ERL-97-68.pdf

BibTeX citation:

@techreport{Wu:M97/68,
    Author= {Wu, Y. and Lieberman, Michael A.},
    Title= {A Traveling Wave Driven, Inductively Coupled Large Area Plasma Source},
    Year= {1997},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3300.html},
    Number= {UCB/ERL M97/68},
}

EndNote citation:

%0 Report
%A Wu, Y. 
%A Lieberman, Michael A. 
%T A Traveling Wave Driven, Inductively Coupled Large Area Plasma Source
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/68
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3300.html
%F Wu:M97/68