Characterization of Extreme Ultraviolet Imaging Systems

Edita Tejnil

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/81
November 1997

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/ERL-97-81.pdf

Advisor: Jeffrey Bokor

BibTeX citation:

@phdthesis{Tejnil:M97/81,
    Author = {Tejnil, Edita},
    Title = {Characterization of Extreme Ultraviolet Imaging Systems},
    School = {EECS Department, University of California, Berkeley},
    Year = {1997},
    Month = {Nov},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3328.html},
    Number = {UCB/ERL M97/81}
}

EndNote citation:

%0 Thesis
%A Tejnil, Edita
%T Characterization of Extreme Ultraviolet Imaging Systems
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/81
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3328.html
%F Tejnil:M97/81