Characterization of Extreme Ultraviolet Imaging Systems

Edita Tejnil

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M97/81

1997

This publication is archived. It is kept only for reference purposes, so it is no longer being updated and may not meet accessibility standards. If you need this content in a different format, please email webteam@eecs.berkeley.edu.

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/Archive/ERL-97-81.pdf

Advisors: Jeffrey Bokor

BibTeX citation:

@phdthesis{Tejnil:M97/81,
    Author= {Tejnil, Edita},
    Title= {Characterization of Extreme Ultraviolet Imaging Systems},
    School= {EECS Department, University of California, Berkeley},
    Year= {1997},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3328.html},
    Number= {UCB/ERL M97/81},
}

EndNote citation:

%0 Thesis
%A Tejnil, Edita 
%T Characterization of Extreme Ultraviolet Imaging Systems
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/81
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3328.html
%F Tejnil:M97/81