Roa Wen Chen

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M97/90

1997

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/ERL-97-90.pdf

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{Chen:M97/90,
    Author= {Chen, Roa Wen},
    Title= {OES-Based Sensing for Plasma Processing in IC Manufacturing},
    School= {EECS Department, University of California, Berkeley},
    Year= {1997},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3349.html},
    Number= {UCB/ERL M97/90},
}

EndNote citation:

%0 Thesis
%A Chen, Roa Wen 
%T OES-Based Sensing for Plasma Processing in IC Manufacturing
%I EECS Department, University of California, Berkeley
%D 1997
%@ UCB/ERL M97/90
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3349.html
%F Chen:M97/90