Assembly Techniques for Microelectromechanical Systems
Michael B. Cohn
EECS Department, University of California, Berkeley
1997
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Cohn:8028, Author= {Cohn, Michael B.}, Title= {Assembly Techniques for Microelectromechanical Systems}, School= {EECS Department, University of California, Berkeley}, Year= {1997}, }
EndNote citation:
%0 Thesis %A Cohn, Michael B. %T Assembly Techniques for Microelectromechanical Systems %I EECS Department, University of California, Berkeley %D 1997 %F Cohn:8028