Position Sensing for Electrostatic Micropositioners
Naiyavudhi Wongkomet
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M98/48
, 1998
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/ERL-98-48.pdf
Advisors: Bernhard E. Boser
BibTeX citation:
@phdthesis{Wongkomet:M98/48, Author= {Wongkomet, Naiyavudhi}, Title= {Position Sensing for Electrostatic Micropositioners}, School= {EECS Department, University of California, Berkeley}, Year= {1998}, Month= {Jul}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html}, Number= {UCB/ERL M98/48}, }
EndNote citation:
%0 Thesis %A Wongkomet, Naiyavudhi %T Position Sensing for Electrostatic Micropositioners %I EECS Department, University of California, Berkeley %D 1998 %@ UCB/ERL M98/48 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html %F Wongkomet:M98/48