Position Sensing for Electrostatic Micropositioners

Naiyavudhi Wongkomet

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M98/48

1998

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/Archive/ERL-98-48.pdf

Advisors: Bernhard E. Boser

BibTeX citation:

@phdthesis{Wongkomet:M98/48,
    Author= {Wongkomet, Naiyavudhi},
    Title= {Position Sensing for Electrostatic Micropositioners},
    School= {EECS Department, University of California, Berkeley},
    Year= {1998},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html},
    Number= {UCB/ERL M98/48},
}

EndNote citation:

%0 Thesis
%A Wongkomet, Naiyavudhi 
%T Position Sensing for Electrostatic Micropositioners
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/48
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html
%F Wongkomet:M98/48