Position Sensing for Electrostatic Micropositioners
Naiyavudhi Wongkomet
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M98/48
1998
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/ERL-98-48.pdf
Advisors: Bernhard E. Boser
BibTeX citation:
@phdthesis{Wongkomet:M98/48,
Author= {Wongkomet, Naiyavudhi},
Title= {Position Sensing for Electrostatic Micropositioners},
School= {EECS Department, University of California, Berkeley},
Year= {1998},
Month= {Jul},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html},
Number= {UCB/ERL M98/48},
}
EndNote citation:
%0 Thesis %A Wongkomet, Naiyavudhi %T Position Sensing for Electrostatic Micropositioners %I EECS Department, University of California, Berkeley %D 1998 %@ UCB/ERL M98/48 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html %F Wongkomet:M98/48