M. Claassen

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M98/59

, 1998

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/ERL-98-59.pdf

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BibTeX citation:

@techreport{Claassen:M98/59,
    Author= {Claassen, M.},
    Title= {Study on Real-Time Develop Rate Monitors for Control of Deep Ultraviolet Lithography},
    Year= {1998},
    Month= {Oct},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3515.html},
    Number= {UCB/ERL M98/59},
}

EndNote citation:

%0 Report
%A Claassen, M. 
%T Study on Real-Time Develop Rate Monitors for Control of Deep Ultraviolet Lithography
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/59
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3515.html
%F Claassen:M98/59