Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation

E. Kawamura and V. Vahedi and Michael A. Lieberman and Charles K. (Ned) Birdsall

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M98/62

1998

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/Archive/ERL-98-62.pdf

BibTeX citation:

@techreport{Kawamura:M98/62,
    Author= {Kawamura, E. and Vahedi, V. and Lieberman, Michael A. and Birdsall, Charles K. (Ned)},
    Title= {Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation},
    Year= {1998},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3522.html},
    Number= {UCB/ERL M98/62},
}

EndNote citation:

%0 Report
%A Kawamura, E. 
%A Vahedi, V. 
%A Lieberman, Michael A. 
%A Birdsall, Charles K. (Ned) 
%T Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/62
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3522.html
%F Kawamura:M98/62