Plasma Process-Induced Charging Damage on Thin Gate Oxides
Donggun Park
EECS Department, University of California, Berkeley
1998
Advisors: Chenming Hu
BibTeX citation:
@phdthesis{Park:8042, Author= {Park, Donggun}, Title= {Plasma Process-Induced Charging Damage on Thin Gate Oxides}, School= {EECS Department, University of California, Berkeley}, Year= {1998}, }
EndNote citation:
%0 Thesis %A Park, Donggun %T Plasma Process-Induced Charging Damage on Thin Gate Oxides %I EECS Department, University of California, Berkeley %D 1998 %F Park:8042