Fast Optical and Process Proximity Correction Algorithms for Integrated Circuit Manufacturing
Nicolas B. Cobb
EECS Department, University of California, Berkeley
1998
Advisors: Avideh Zakhor
BibTeX citation:
@phdthesis{Cobb:8059,
Author= {Cobb, Nicolas B.},
Title= {Fast Optical and Process Proximity Correction Algorithms for Integrated Circuit Manufacturing},
School= {EECS Department, University of California, Berkeley},
Year= {1998},
}
EndNote citation:
%0 Thesis %A Cobb, Nicolas B. %T Fast Optical and Process Proximity Correction Algorithms for Integrated Circuit Manufacturing %I EECS Department, University of California, Berkeley %D 1998 %F Cobb:8059