S. Sundar Kumar Iyer

EECS Department, University of California, Berkeley

1998

Advisors: Chenming Hu

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BibTeX citation:

@phdthesis{Iyer:8066,
    Author= {Iyer, S. Sundar Kumar},
    Title= {Separation by Plasma Implantation of Oxygen with Plasma Immersion Ion Implantation to Form Silicon-on-Insulator},
    School= {EECS Department, University of California, Berkeley},
    Year= {1998},
}

EndNote citation:

%0 Thesis
%A Iyer, S. Sundar Kumar 
%T Separation by Plasma Implantation of Oxygen with Plasma Immersion Ion Implantation to Form Silicon-on-Insulator
%I EECS Department, University of California, Berkeley
%D 1998
%F Iyer:8066