A Syntactic Method for Analyzing Plasma Etching Signals

Dong Wu Zhao

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M99/41
July 1999

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/ERL-99-41.pdf

BibTeX citation:

@techreport{Zhao:M99/41,
    Author = {Zhao, Dong Wu},
    Title = {A Syntactic Method for Analyzing Plasma Etching Signals},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1999},
    Month = {Jul},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/28365.html},
    Number = {UCB/ERL M99/41}
}

EndNote citation:

%0 Report
%A Zhao, Dong Wu
%T A Syntactic Method for Analyzing Plasma Etching Signals
%I EECS Department, University of California, Berkeley
%D 1999
%@ UCB/ERL M99/41
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/28365.html
%F Zhao:M99/41