Barry P. Linder

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M99/8

, 1999

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/ERL-99-8.pdf

Advisors: Nathan W. Cheung

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BibTeX citation:

@phdthesis{Linder:M99/8,
    Author= {Linder, Barry P.},
    Title= {Investigation of Plasma Implantation and Gate Oxide Charging During Plasma Processing},
    School= {EECS Department, University of California, Berkeley},
    Year= {1999},
    Month= {Feb},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3579.html},
    Number= {UCB/ERL M99/8},
}

EndNote citation:

%0 Thesis
%A Linder, Barry P. 
%T Investigation of Plasma Implantation and Gate Oxide Charging During Plasma Processing
%I EECS Department, University of California, Berkeley
%D 1999
%@ UCB/ERL M99/8
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3579.html
%F Linder:M99/8