MicroElectroMechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing

Darrin J. Young

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M99/24

1999

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/Archive/ERL-99-24.pdf

Advisors: Bernhard E. Boser

BibTeX citation:

@phdthesis{Young:M99/24,
    Author= {Young, Darrin J.},
    Title= {MicroElectroMechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing},
    School= {EECS Department, University of California, Berkeley},
    Year= {1999},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3653.html},
    Number= {UCB/ERL M99/24},
}

EndNote citation:

%0 Thesis
%A Young, Darrin J. 
%T MicroElectroMechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing
%I EECS Department, University of California, Berkeley
%D 1999
%@ UCB/ERL M99/24
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3653.html
%F Young:M99/24