E. Croffie

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M99/26

, 1999

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/ERL-99-26.pdf

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BibTeX citation:

@techreport{Croffie:M99/26,
    Author= {Croffie, E.},
    Title= {Moving Boundary Models and Methods for Deep Submicron Resist Process Simulation},
    Year= {1999},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3655.html},
    Number= {UCB/ERL M99/26},
}

EndNote citation:

%0 Report
%A Croffie, E. 
%T Moving Boundary Models and Methods for Deep Submicron Resist Process Simulation
%I EECS Department, University of California, Berkeley
%D 1999
%@ UCB/ERL M99/26
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3655.html
%F Croffie:M99/26