M. Freed

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M99/28

, 1999

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/ERL-99-28.pdf

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BibTeX citation:

@techreport{Freed:M99/28,
    Author= {Freed, M.},
    Title= {In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes},
    Year= {1999},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3657.html},
    Number= {UCB/ERL M99/28},
}

EndNote citation:

%0 Report
%A Freed, M. 
%T In-Situ Etch Rate Sensor Arrays for Plasma Etch Processes
%I EECS Department, University of California, Berkeley
%D 1999
%@ UCB/ERL M99/28
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3657.html
%F Freed:M99/28