A. Gleckman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/6

, 1999

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/ERL-00-6.pdf

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BibTeX citation:

@techreport{Gleckman:M00/6,
    Author= {Gleckman, A.},
    Title= {Autonomous Temperature Sensor for Semiconductor Processing},
    Year= {1999},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3808.html},
    Number= {UCB/ERL M00/6},
}

EndNote citation:

%0 Report
%A Gleckman, A. 
%T Autonomous Temperature Sensor for Semiconductor Processing
%I EECS Department, University of California, Berkeley
%D 1999
%@ UCB/ERL M00/6
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3808.html
%F Gleckman:M00/6