Probabilistic Modeling for Fault Classification of Plasma Equipment
A. M. Ison
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/2
2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-2.pdf
Advisors: Costas J. Spanos
BibTeX citation:
@phdthesis{Ison:M00/2,
Author= {Ison, A. M.},
Title= {Probabilistic Modeling for Fault Classification of Plasma Equipment},
School= {EECS Department, University of California, Berkeley},
Year= {2000},
Month= {Jan},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html},
Number= {UCB/ERL M00/2},
}
EndNote citation:
%0 Thesis %A Ison, A. M. %T Probabilistic Modeling for Fault Classification of Plasma Equipment %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/2 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html %F Ison:M00/2