Probabilistic Modeling for Fault Classification of Plasma Equipment

A. M. Ison

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/2

2000

This publication is archived. It is kept only for reference purposes, so it is no longer being updated and may not meet accessibility standards. If you need this content in a different format, please email webteam@eecs.berkeley.edu.

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/Archive/ERL-00-2.pdf

Advisors: Costas J. Spanos

BibTeX citation:

@phdthesis{Ison:M00/2,
    Author= {Ison, A. M.},
    Title= {Probabilistic Modeling for Fault Classification of Plasma Equipment},
    School= {EECS Department, University of California, Berkeley},
    Year= {2000},
    Month= {Jan},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html},
    Number= {UCB/ERL M00/2},
}

EndNote citation:

%0 Thesis
%A Ison, A. M. 
%T Probabilistic Modeling for Fault Classification of Plasma Equipment
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/2
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html
%F Ison:M00/2