Probabilistic Modeling for Fault Classification of Plasma Equipment

A. M. Ison

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/2
January 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-2.pdf

Advisor: Costas J. Spanos

BibTeX citation:

@phdthesis{Ison:M00/2,
    Author = {Ison, A. M.},
    Title = {Probabilistic Modeling for Fault Classification of Plasma Equipment},
    School = {EECS Department, University of California, Berkeley},
    Year = {2000},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html},
    Number = {UCB/ERL M00/2}
}

EndNote citation:

%0 Thesis
%A Ison, A. M.
%T Probabilistic Modeling for Fault Classification of Plasma Equipment
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/2
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3801.html
%F Ison:M00/2