Operation of a Large Area Plasma Source (LAPS) with Oxygen Gas
K. Takechi and Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/15
, 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-15.pdf
BibTeX citation:
@techreport{Takechi:M00/15, Author= {Takechi, K. and Lieberman, Michael A.}, Title= {Operation of a Large Area Plasma Source (LAPS) with Oxygen Gas}, Year= {2000}, Month= {Mar}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3824.html}, Number= {UCB/ERL M00/15}, }
EndNote citation:
%0 Report %A Takechi, K. %A Lieberman, Michael A. %T Operation of a Large Area Plasma Source (LAPS) with Oxygen Gas %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/15 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3824.html %F Takechi:M00/15