Operation of a Large Area Plasma Source (LAPS) with Oxygen Gas

K. Takechi and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/15
March 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-15.pdf

BibTeX citation:

@techreport{Takechi:M00/15,
    Author = {Takechi, K. and Lieberman, Michael A.},
    Title = {Operation of a Large Area Plasma Source (LAPS) with Oxygen Gas},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    Month = {Mar},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3824.html},
    Number = {UCB/ERL M00/15}
}

EndNote citation:

%0 Report
%A Takechi, K.
%A Lieberman, Michael A.
%T Operation of a Large Area Plasma Source (LAPS) with Oxygen Gas
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/15
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3824.html
%F Takechi:M00/15