Stroboscopic Interferometer System for Dynamic MEMS Characterization

M.R. Hart and R.A. Conant and Kam Y. Lau and Richard S. Muller

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/18

2000

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/Archive/ERL-00-18.pdf

BibTeX citation:

@techreport{Hart:M00/18,
    Author= {Hart, M.R. and Conant, R.A. and Lau, Kam Y. and Muller, Richard S.},
    Title= {Stroboscopic Interferometer System for Dynamic MEMS Characterization},
    Year= {2000},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html},
    Number= {UCB/ERL M00/18},
}

EndNote citation:

%0 Report
%A Hart, M.R. 
%A Conant, R.A. 
%A Lau, Kam Y. 
%A Muller, Richard S. 
%T Stroboscopic Interferometer System for Dynamic MEMS Characterization
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/18
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html
%F Hart:M00/18