M.R. Hart, R.A. Conant, Kam Y. Lau and Richard S. Muller
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/18
April 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-18.pdf
BibTeX citation:
@techreport{Hart:M00/18, Author = {Hart, M.R. and Conant, R.A. and Lau, Kam Y. and Muller, Richard S.}, Title = {Stroboscopic Interferometer System for Dynamic MEMS Characterization}, Institution = {EECS Department, University of California, Berkeley}, Year = {2000}, Month = {Apr}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html}, Number = {UCB/ERL M00/18} }
EndNote citation:
%0 Report %A Hart, M.R. %A Conant, R.A. %A Lau, Kam Y. %A Muller, Richard S. %T Stroboscopic Interferometer System for Dynamic MEMS Characterization %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/18 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3829.html %F Hart:M00/18