Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography

Nen-Wen Pu

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/19

2000

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/Archive/ERL-00-19.pdf

Advisors: Jeffrey Bokor

BibTeX citation:

@phdthesis{Pu:M00/19,
    Author= {Pu, Nen-Wen},
    Title= {Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2000},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3833.html},
    Number= {UCB/ERL M00/19},
}

EndNote citation:

%0 Thesis
%A Pu, Nen-Wen 
%T Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/19
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3833.html
%F Pu:M00/19