Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography
Nen-Wen Pu
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/19
, 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-19.pdf
Advisors: Jeffrey Bokor
BibTeX citation:
@phdthesis{Pu:M00/19, Author= {Pu, Nen-Wen}, Title= {Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography}, School= {EECS Department, University of California, Berkeley}, Year= {2000}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3833.html}, Number= {UCB/ERL M00/19}, }
EndNote citation:
%0 Thesis %A Pu, Nen-Wen %T Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/19 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3833.html %F Pu:M00/19