Effect of Metastable Atoms in RF Argon Discharges
M. Roberto
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/23
, 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-23.pdf
BibTeX citation:
@techreport{Roberto:M00/23, Author= {Roberto, M.}, Title= {Effect of Metastable Atoms in RF Argon Discharges}, Year= {2000}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html}, Number= {UCB/ERL M00/23}, }
EndNote citation:
%0 Report %A Roberto, M. %T Effect of Metastable Atoms in RF Argon Discharges %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/23 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3840.html %F Roberto:M00/23