A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen
M. Roberto
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/24
, 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-24.pdf
BibTeX citation:
@techreport{Roberto:M00/24, Author= {Roberto, M.}, Title= {A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen}, Year= {2000}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html}, Number= {UCB/ERL M00/24}, }
EndNote citation:
%0 Report %A Roberto, M. %T A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/24 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html %F Roberto:M00/24