A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen

M. Roberto

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/24

2000

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/Archive/ERL-00-24.pdf

BibTeX citation:

@techreport{Roberto:M00/24,
    Author= {Roberto, M.},
    Title= {A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen},
    Year= {2000},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html},
    Number= {UCB/ERL M00/24},
}

EndNote citation:

%0 Report
%A Roberto, M. 
%T A Monte Carlo Collision Model to Study RF Discharges with a Mixture of Argon and Oxygen
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/24
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3841.html
%F Roberto:M00/24