K. Takechi and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/33

, 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-33.pdf


BibTeX citation:

@techreport{Takechi:M00/33,
    Author= {Takechi, K. and Lieberman, Michael A.},
    Title= {An Oxygen Discharge Model for a Large Area Plasma Source (LAPS)},
    Year= {2000},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3850.html},
    Number= {UCB/ERL M00/33},
}

EndNote citation:

%0 Report
%A Takechi, K. 
%A Lieberman, Michael A. 
%T An Oxygen Discharge Model for a Large Area Plasma Source (LAPS)
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/33
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3850.html
%F Takechi:M00/33