An Oxygen Discharge Model for a Large Area Plasma Source (LAPS)
K. Takechi and Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/33
, 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-33.pdf
BibTeX citation:
@techreport{Takechi:M00/33, Author= {Takechi, K. and Lieberman, Michael A.}, Title= {An Oxygen Discharge Model for a Large Area Plasma Source (LAPS)}, Year= {2000}, Month= {Jun}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3850.html}, Number= {UCB/ERL M00/33}, }
EndNote citation:
%0 Report %A Takechi, K. %A Lieberman, Michael A. %T An Oxygen Discharge Model for a Large Area Plasma Source (LAPS) %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/33 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3850.html %F Takechi:M00/33