J-W. Lee

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/49

, 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-49.pdf

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BibTeX citation:

@techreport{Lee:M00/49,
    Author= {Lee, J-W.},
    Title= {Spatially Resolved Optical Emission Spectroscopy for Plasma Etching},
    Year= {2000},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3888.html},
    Number= {UCB/ERL M00/49},
}

EndNote citation:

%0 Report
%A Lee, J-W. 
%T Spatially Resolved Optical Emission Spectroscopy for Plasma Etching
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3888.html
%F Lee:M00/49