CMOS Baseline Process in the UC Berkeley Microfabrication Lab Report II
L. Voros
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/61
, 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-61.pdf
BibTeX citation:
@techreport{Voros:M00/61, Author= {Voros, L.}, Title= {CMOS Baseline Process in the UC Berkeley Microfabrication Lab Report II}, Year= {2000}, Month= {Dec}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3924.html}, Number= {UCB/ERL M00/61}, }
EndNote citation:
%0 Report %A Voros, L. %T CMOS Baseline Process in the UC Berkeley Microfabrication Lab Report II %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/61 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3924.html %F Voros:M00/61