CMOS Baseline Process in the UC Berkeley Microfabrication Lab Report II

L. Voros

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/61

2000

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/Archive/ERL-00-61.pdf

BibTeX citation:

@techreport{Voros:M00/61,
    Author= {Voros, L.},
    Title= {CMOS Baseline Process in the UC Berkeley Microfabrication Lab Report II},
    Year= {2000},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3924.html},
    Number= {UCB/ERL M00/61},
}

EndNote citation:

%0 Report
%A Voros, L. 
%T CMOS Baseline Process in the UC Berkeley Microfabrication Lab Report II
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/61
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3924.html
%F Voros:M00/61