Electromagnetic Simulation and Modeling with Applications in Lithography

Thomas V. Pistor

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M01/19

2001

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/Archive/ERL-01-19.pdf

Advisors: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Pistor:M01/19,
    Author= {Pistor, Thomas V.},
    Title= {Electromagnetic Simulation and Modeling with Applications in Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2001},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8126.html},
    Number= {UCB/ERL M01/19},
}

EndNote citation:

%0 Thesis
%A Pistor, Thomas V. 
%T Electromagnetic Simulation and Modeling with Applications in Lithography
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/19
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8126.html
%F Pistor:M01/19