Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS
Yang Kyu Choi
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M01/38
2001
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-38.pdf
Advisors: Chenming Hu
BibTeX citation:
@phdthesis{Choi:M01/38,
Author= {Choi, Yang Kyu},
Title= {Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS},
School= {EECS Department, University of California, Berkeley},
Year= {2001},
Month= {Dec},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html},
Number= {UCB/ERL M01/38},
}
EndNote citation:
%0 Thesis %A Choi, Yang Kyu %T Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS %I EECS Department, University of California, Berkeley %D 2001 %@ UCB/ERL M01/38 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html %F Choi:M01/38