Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS

Yang Kyu Choi

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M01/38

2001

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/Archive/ERL-01-38.pdf

Advisors: Chenming Hu

BibTeX citation:

@phdthesis{Choi:M01/38,
    Author= {Choi, Yang Kyu},
    Title= {Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS},
    School= {EECS Department, University of California, Berkeley},
    Year= {2001},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html},
    Number= {UCB/ERL M01/38},
}

EndNote citation:

%0 Thesis
%A Choi, Yang Kyu 
%T Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/38
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html
%F Choi:M01/38