Mason L. Freed

EECS Department, University of California, Berkeley

2001

Advisors: Costas J. Spanos and Kameshwar Poolla

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BibTeX citation:

@phdthesis{Freed:8152,
    Author= {Freed, Mason L.},
    Title= {Wafer-Mounted Sensor Arrays for Plasma Etch Processes},
    School= {EECS Department, University of California, Berkeley},
    Year= {2001},
}

EndNote citation:

%0 Thesis
%A Freed, Mason L. 
%T Wafer-Mounted Sensor Arrays for Plasma Etch Processes
%I EECS Department, University of California, Berkeley
%D 2001
%F Freed:8152