Hybrid Surface/Bulk-Micromachining Processes for Scanning Micro-Optical Components
Jocelyn T. Nee
EECS Department, University of California, Berkeley
2001
Advisors: Kam Y. Lau
BibTeX citation:
@phdthesis{Nee:8165,
Author= {Nee, Jocelyn T.},
Title= {Hybrid Surface/Bulk-Micromachining Processes for Scanning Micro-Optical Components},
School= {EECS Department, University of California, Berkeley},
Year= {2001},
}
EndNote citation:
%0 Thesis %A Nee, Jocelyn T. %T Hybrid Surface/Bulk-Micromachining Processes for Scanning Micro-Optical Components %I EECS Department, University of California, Berkeley %D 2001 %F Nee:8165