Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography
Konstantinos Adam
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M01/42
, 2001
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-42.pdf
Advisors: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Adam:M01/42, Author= {Adam, Konstantinos}, Title= {Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography}, School= {EECS Department, University of California, Berkeley}, Year= {2001}, Month= {Dec}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html}, Number= {UCB/ERL M01/42}, }
EndNote citation:
%0 Thesis %A Adam, Konstantinos %T Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography %I EECS Department, University of California, Berkeley %D 2001 %@ UCB/ERL M01/42 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html %F Adam:M01/42