Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography

Konstantinos Adam

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/42
December 2001

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-42.pdf

Advisor: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Adam:M01/42,
    Author = {Adam, Konstantinos},
    Title = {Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2001},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html},
    Number = {UCB/ERL M01/42}
}

EndNote citation:

%0 Thesis
%A Adam, Konstantinos
%T Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/42
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html
%F Adam:M01/42