Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography
Konstantinos Adam
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M01/42
2001
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-42.pdf
Advisors: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Adam:M01/42,
Author= {Adam, Konstantinos},
Title= {Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography},
School= {EECS Department, University of California, Berkeley},
Year= {2001},
Month= {Dec},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html},
Number= {UCB/ERL M01/42},
}
EndNote citation:
%0 Thesis %A Adam, Konstantinos %T Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography %I EECS Department, University of California, Berkeley %D 2001 %@ UCB/ERL M01/42 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html %F Adam:M01/42