Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography

Konstantinos Adam

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M01/42

2001

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/Archive/ERL-01-42.pdf

Advisors: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Adam:M01/42,
    Author= {Adam, Konstantinos},
    Title= {Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2001},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html},
    Number= {UCB/ERL M01/42},
}

EndNote citation:

%0 Thesis
%A Adam, Konstantinos 
%T Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from Three-Dimensional Structures with Applications in Lithography
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/42
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8191.html
%F Adam:M01/42