Simulation tools for optical resist models STORM

Ebo Harry Croffie

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/29
August 2001

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-29.pdf

BibTeX citation:

@techreport{Croffie:M01/29,
    Author = {Croffie, Ebo Harry},
    Title = {Simulation tools for optical resist models STORM},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2001},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9589.html},
    Number = {UCB/ERL M01/29}
}

EndNote citation:

%0 Report
%A Croffie, Ebo Harry
%T Simulation tools for optical resist models STORM
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/29
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9589.html
%F Croffie:M01/29