Jiangxin Wang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M01/40

, 2001

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-40.pdf

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BibTeX citation:

@techreport{Wang:M01/40,
    Author= {Wang, Jiangxin},
    Title= {Equipment and process modeling and diagnostics in semiconductor manufacturing},
    Year= {2001},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html},
    Number= {UCB/ERL M01/40},
}

EndNote citation:

%0 Report
%A Wang, Jiangxin 
%T Equipment and process modeling and diagnostics in semiconductor manufacturing
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/40
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9597.html
%F Wang:M01/40