B. Wu

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M02/4

2002

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/ERL-02-4.pdf

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BibTeX citation:

@techreport{Wu:M02/4,
    Author= {Wu, B.},
    Title= {Coulomb Interactions in High Throughput Electron Beam Lithography},
    Year= {2002},
    Month= {Feb},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/3964.html},
    Number= {UCB/ERL M02/4},
}

EndNote citation:

%0 Report
%A Wu, B. 
%T Coulomb Interactions in High Throughput Electron Beam Lithography
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/4
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/3964.html
%F Wu:M02/4