Haolin Zhang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/27
September 2002
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/ERL-02-27.pdf
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Zhang:M02/27, Author = {Zhang, Haolin}, Title = {Causal Analysis of Systematic Spatial Variation in Optical Lithography}, School = {EECS Department, University of California, Berkeley}, Year = {2002}, Month = {Sep}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html}, Number = {UCB/ERL M02/27} }
EndNote citation:
%0 Thesis %A Zhang, Haolin %T Causal Analysis of Systematic Spatial Variation in Optical Lithography %I EECS Department, University of California, Berkeley %D 2002 %@ UCB/ERL M02/27 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html %F Zhang:M02/27