Causal Analysis of Systematic Spatial Variation in Optical Lithography

Haolin Zhang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M02/27

2002

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/Archive/ERL-02-27.pdf

Advisors: Costas J. Spanos

BibTeX citation:

@phdthesis{Zhang:M02/27,
    Author= {Zhang, Haolin},
    Title= {Causal Analysis of Systematic Spatial Variation in Optical Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2002},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html},
    Number= {UCB/ERL M02/27},
}

EndNote citation:

%0 Thesis
%A Zhang, Haolin 
%T Causal Analysis of Systematic Spatial Variation in Optical Lithography
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/27
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4012.html
%F Zhang:M02/27