Characterization of Systematic Spatial Variation in Photolithography

J. P. Cain

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M02/43

2002

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/Archive/ERL-02-43.pdf

BibTeX citation:

@techreport{Cain:M02/43,
    Author= {Cain, J. P.},
    Title= {Characterization of Systematic Spatial Variation in Photolithography},
    Year= {2002},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html},
    Number= {UCB/ERL M02/43},
}

EndNote citation:

%0 Report
%A Cain, J. P. 
%T Characterization of Systematic Spatial Variation in Photolithography
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/43
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html
%F Cain:M02/43