J. P. Cain
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M02/43
December 2002
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/ERL-02-43.pdf
BibTeX citation:
@techreport{Cain:M02/43, Author = {Cain, J. P.}, Title = {Characterization of Systematic Spatial Variation in Photolithography}, Institution = {EECS Department, University of California, Berkeley}, Year = {2002}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html}, Number = {UCB/ERL M02/43} }
EndNote citation:
%0 Report %A Cain, J. P. %T Characterization of Systematic Spatial Variation in Photolithography %I EECS Department, University of California, Berkeley %D 2002 %@ UCB/ERL M02/43 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4043.html %F Cain:M02/43