Integrated Surface Micromachined Frame Microgyroscopes
Moorthi Palaniapan
EECS Department, University of California, Berkeley
2002
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Palaniapan:8175, Author= {Palaniapan, Moorthi}, Title= {Integrated Surface Micromachined Frame Microgyroscopes}, School= {EECS Department, University of California, Berkeley}, Year= {2002}, }
EndNote citation:
%0 Thesis %A Palaniapan, Moorthi %T Integrated Surface Micromachined Frame Microgyroscopes %I EECS Department, University of California, Berkeley %D 2002 %F Palaniapan:8175