Microsystems for Electrostatic Sensing
Patrick S. Riehl
EECS Department, University of California, Berkeley
2002
Advisors: Richard S. Muller
BibTeX citation:
@phdthesis{Riehl:8180, Author= {Riehl, Patrick S.}, Title= {Microsystems for Electrostatic Sensing}, School= {EECS Department, University of California, Berkeley}, Year= {2002}, }
EndNote citation:
%0 Thesis %A Riehl, Patrick S. %T Microsystems for Electrostatic Sensing %I EECS Department, University of California, Berkeley %D 2002 %F Riehl:8180