Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems
Ashwin A. Seshia
EECS Department, University of California, Berkeley
2002
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Seshia:8182,
Author= {Seshia, Ashwin A.},
Title= {Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems},
School= {EECS Department, University of California, Berkeley},
Year= {2002},
}
EndNote citation:
%0 Thesis %A Seshia, Ashwin A. %T Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems %I EECS Department, University of California, Berkeley %D 2002 %F Seshia:8182