P. D. Friedberg
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M03/16
May 2003
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/ERL-03-16.pdf
BibTeX citation:
@techreport{Friedberg:M03/16, Author = {Friedberg, P. D.}, Title = {First Principle-based State Estimator for Photolithography Control Using Full Profile Metrology}, Institution = {EECS Department, University of California, Berkeley}, Year = {2003}, Month = {May}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4085.html}, Number = {UCB/ERL M03/16} }
EndNote citation:
%0 Report %A Friedberg, P. D. %T First Principle-based State Estimator for Photolithography Control Using Full Profile Metrology %I EECS Department, University of California, Berkeley %D 2003 %@ UCB/ERL M03/16 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4085.html %F Friedberg:M03/16