Michael V. Williamson
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M03/46
November 2003
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/ERL-03-46.pdf
Advisor: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Williamson:M03/46, Author = {Williamson, Michael V.}, Title = {Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)}, School = {EECS Department, University of California, Berkeley}, Year = {2003}, Month = {Nov}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html}, Number = {UCB/ERL M03/46} }
EndNote citation:
%0 Thesis %A Williamson, Michael V. %T Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER) %I EECS Department, University of California, Berkeley %D 2003 %@ UCB/ERL M03/46 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html %F Williamson:M03/46