Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)

Michael V. Williamson

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M03/46

2003

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/Archive/ERL-03-46.pdf

Advisors: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Williamson:M03/46,
    Author= {Williamson, Michael V.},
    Title= {Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)},
    School= {EECS Department, University of California, Berkeley},
    Year= {2003},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html},
    Number= {UCB/ERL M03/46},
}

EndNote citation:

%0 Thesis
%A Williamson, Michael V. 
%T Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)
%I EECS Department, University of California, Berkeley
%D 2003
%@ UCB/ERL M03/46
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html
%F Williamson:M03/46