Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)
Michael V. Williamson
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M03/46
, 2003
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/ERL-03-46.pdf
Advisors: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Williamson:M03/46, Author= {Williamson, Michael V.}, Title= {Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER)}, School= {EECS Department, University of California, Berkeley}, Year= {2003}, Month= {Nov}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html}, Number= {UCB/ERL M03/46}, }
EndNote citation:
%0 Thesis %A Williamson, Michael V. %T Enhanced, Quantitative Analysis of Resist Image Contrast upon Line Edge Roughness (LER) %I EECS Department, University of California, Berkeley %D 2003 %@ UCB/ERL M03/46 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4182.html %F Williamson:M03/46