Yashesh A. Shroff

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M04/32

, 2003

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/ERL-04-32.pdf

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Shroff:M04/32,
    Author= {Shroff, Yashesh A.},
    Title= {Design, Fabrication, and Optical Analysis of Nanomirrors for Maskless EUV Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2003},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4242.html},
    Number= {UCB/ERL M04/32},
}

EndNote citation:

%0 Thesis
%A Shroff, Yashesh A. 
%T Design, Fabrication, and Optical Analysis of Nanomirrors for Maskless EUV Lithography
%I EECS Department, University of California, Berkeley
%D 2003
%@ UCB/ERL M04/32
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2003/4242.html
%F Shroff:M04/32